视野62*62mm,量程±6.5mm;重复精度1μm
线长2.3mm,量程1.4mm,Z轴重复性0.1μm
线长10mm,量程6mm,X方向分辨率4.9μm
线长6mm,量程3mm,Z轴重复性0.1μm
线长6mm,量程2.4mm,Z轴重复性0.2μm
线长13mm,量程6mm,Z轴重复性0.15μm
电源19V≥5A,功率55w,光耦隔离
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